The technical project for the preparation of nano-diamond films under the strong magnetic field undertaken by the research group of Professor Xia Yiben of Shanghai University passed the acceptance of the Municipal Science and Technology Commission.
The research on the preparation of diamond thin films by hot wire CVD method under strong magnetic field is the first in China and abroad. The use of strong magnetic fields is expected to overcome the limitations of the harsh process conditions for preparing diamond films by conventional methods, simplifying the preparation process, and easily obtaining nanocrystallization, highly oriented and low-temperature growth of diamond films, and is expected to achieve low cost, large area, high rate and Preparation of high quality diamond films.
The research group developed nano-crystallization, highly oriented and low-temperature growth technology of diamond film under strong magnetic field to realize low-cost, large-area and high-speed growth of diamond film preparation. Developed diamond film hot-wire chemical vapor deposition (HFCVD) in strong magnetic field. The prototype of the device provides a reference for large-scale applications; explores the growth mechanism of diamond films under strong magnetic fields. A HFCVD small device for preparing a diamond film in a strong magnetic field was designed and built by itself, which solved the problem of difficulty in cooling the cavity of the HFCVD device under strong magnetic field and interference of the magnetic field with the heating wire. The successful development and operation of the equipment pioneered the research on the preparation of diamond films under strong magnetic fields, and laid the foundation for future research work on diamonds. The effects of magnetic field parameters, deposition parameters (deposition pressure, carbon source concentration, deposition temperature, heating method, etc.) on the properties of diamond films were investigated. The effects of various process parameters on the grain size, surface roughness, orientation and growth rate of diamond films were obtained. The low temperature, high rate (greater than 2.0 μm/h) and orientation (orientation greater than 95%) growth of the diamond film were achieved by optimized process parameters. The obtained diamond film has a grain size of less than 50 nm and a roughness of less than 30 nm. Through the systematic study on the growth law of diamond film under strong magnetic field, the nucleation mechanism and nano-crystallization and low-temperature growth mechanism of diamond film under strong magnetic field are proposed, which provides a theoretical basis for obtaining diamond film with easy structure and quality control.
(Shanghai Nano Center Project Department)
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