Figure Typical small sputter ion pump system of ultra-high vacuum operating process is as follows: Start (cooling) adsorption pump; If the roughing is the use of two molecular sieve adsorption pump, the first cooling start the first adsorption pump, while the titanium sublimation pump Pass cooling water. Use the first stage pump to roughly pump the system up to about 1000 Pa, and then close the first stage adsorption pump and the rough pumping line, and then use the second stage pump to pump the system to 0.4 to 0.2 Pa. If you use three suction pump rough pumping, you can use the first pump to pump 3000 to 5000Pa pressure, with the second pump to 15Pa pressure, the third pump to 0.1Pa. Staged pumping allows the capture of inert gas entering the first stage in viscous flow conditions while also reducing the amount of gas withdrawn at the last stage. The effect of both is to reduce the system's ultimate pressure. If the system has titanium sublimation pump, the vacuum chamber pressure is about 0.5Pa when you can start the sublimation pump, began continuous sublimation, open the high vacuum valve on the vacuum chamber, when the vacuum chamber pressure reaches 0.1 ~ 0.05Pa can be Start the sputter ion pump, then close the roughing valve to separate the roughing pipe from the system. When the system pressure is lower than 10-5Pa, the titanium sublimation pump can work intermittently. As the system pressure drops, the steaming titanium interval time can be longer than once. Timing circuits can be used to control the sublimation time and sublimation interval. If the sputter ion pump had been exposed to atmosphere before the system was operated, the sequence of the system was to first cool the adsorption pump and turn on the cooling water of the titanium sublimation pump, with the high vacuum valve and roughing valve open, as described above The order, with suction pump and titanium sublimation pump crude pumping system. When connected to the sputter ion pump power supply, due to the outlet electrode of the pump, the pressure of the system will be increased, so still need to use suction pump and titanium sublimation pump at this time until the exhaust gas load exhausted so far . When the system pressure is stable at about 0.1Pa, you can close the rough pipe valve, and then continue to work in normal mode. Ion pump system downtime, the first high vacuum valve is closed, and then turn off the ion pump power, the entire system can be maintained in a vacuum state until the next reuse. Operating Precautions (1) Sputtering ion pumps should operate at steady pressures below 10-4 Pa. (2) Do not start the sputter ion pump when the system pressure is higher than 10-1Pa. (3) Do not allow the ion pump to pump a large amount of helium at high pressure. (4) the vacuum chamber to enlarge the air, the valve will be used to cut off the ion pump. (5) The adsorption pump should be operated in the correct sequence. The following figure shows a typical small splash ion pump oil-free ultra-high vacuum pumping system. 1. Sputtering Ion Pump 2. Titanium Sublimation Pump 3. High Vacuum Valve 4. Vacuum Chamber 5. Roughing Valve 6. Molecular Sieve Adsorption Pump 7. Pipeline Valve