This breakthrough in the MIPT Superhard and Novel Carbon Materials Technology Institute (TISNCM) and the Siberian Federal University – the Diamond Substrate MEMS Resonator, capable of maintaining over 2000 GHz at speeds in excess of 20 GHz Quality factor (Q). This capability can be used not only to generate high-speed frequency signals, but also to create ultra-sensitive surface and bulk acoustic wave (SAW/BAW) resonators for biosensors that detect the proximity of a single bacterium and other nanoscale toxicants.
“Many studies have focused on high-frequency SAW/BAW resonators. Several reports have produced very high frequency results, but their Q values ​​are quite low,†said TISNCM researcher Arseniy Telichko. “Our diamond components work.†At tens of GHz, and only by adjusting its parameters, such as thickness, width and electrode material, the results of near-monomorphic bacteria detection can be produced."
Russian researchers say that by fine-tuning their high-pressure (HPHT) deposition process, they have achieved superior performance over other studies. Most researchers use slow-growing chemical vapor deposition (CVD) processes, and TISNCM uses methods that are not only faster, but also produce a more perfect lattice.
“The point is that other authors often use CVD diamonds with relatively slow carbon deposition techniques. The diamond crystals slowly grow, forming a thin film. But this CVD growth method causes the diamond to stress—many internal forces "There is an imbalance in the crystals." Therefore, Telichko pointed out that "through HPHT, we use a single crystal diamond that is almost purely carbon-synthesized. Therefore, our diamond is actually a single crystal with minimal internal stress. So, this Single crystal diamond-based components can operate at higher frequencies, have higher quality factors, and are generally superior to CVD diamonds."
Telichko pointed out that the key to achieving better applications with its pure crystalline substrate is to laminate the piezoelectric material on the substrates of the two metal interlayers (aluminum and molybdenum). Therefore, the structure of the resonator can not only achieve higher frequencies, but also achieve higher Q values ​​simultaneously.
“In the high-overtone sonic resonator structure we studied, all the parameters are mainly determined by the substrate material. Using HPHT diamond instead of quartz or even CVD diamond substrate can achieve better performance, higher Q value, and more High operating frequencies (up to 20 GHz) and lower loss components," Telichko said. “Recently we have been able to show that the attenuation of diamonds can reach linear frequency correlation after 1-GHz, while other crystals still have square correlation. This means that the diamond attenuation (energy consumption) after 1-GHz is more than other crystals. Low, making diamonds an ideal substrate for high-frequency electronics applications."
Telichko said that MIPT has built many diamond resonators in experimental research, both capable of exhibiting >20-GHz operation capability, "is the latest world record written by this type of component." However, the research team noticed here. At a speed, a wave phenomenon occurs near the overtone, which explains the "Lamb-mode" waveform - an elastic wave that depends on the SAW/BAW plane motion.
In the future, researchers plan to use other new materials to achieve piezoelectric films, thus avoiding the Lamb waves caused by peak mixing.
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